Thermal conductivity of dielectric thin films by the 3-omega method

We have constructed an apparatus to measure the thermal conductivity of both bulk and thin film materials using a modification to the 3-omega method. This method uses a thin film resistance heater to simultaneously heat the material of interest and to measure the temperature rise created at the material surface. Using these temperature measurements, the thermal conductivity and other materials properties can be extracted. In this presentation, I will detail the measurement process and show experimental results on several materials, including novel solution deposited amorphous aluminum phosphate (AlPO) thin films.