High Resolution Electron Microscopy in Nano-Technology

Current trends in microelectronics are associated with development nanometric scale structures, an integration of opto- and microelectronics elements on Si platform and radical innovations in materials, processes and metrology. In coming decades Si-based CMOS technology will most likely merge with nano-technology resulting in hybrid-type devices. The next generations of devices and technology requires joint efforts of scientists and engineers in physics, chemistry, material sciences, and other related disciplines, and innovations in metrology and materials development. High resolution electron microscopy became a routine technique for characterization of materials being crucial for nano-technology. Application of electron microscopy to nano-technology and recent breakthrough in its resolution below 1 Angstrom level will be discussed during the presentation