Events

Laser annealing and ablation was a subject of research since the first days of lasers. Recent interest to this topic is associated with discovering of new thermo-physical regimes at which materials subjected to laser irradiation are being structured at the sub-wavelength dimension scale. Our recent studies report super-resolution in laser ablation of thin films and formation of nano-sharp conical structures on silicon-on-insulator (SOI) initiated by single pulse of a KrF excimer laser operating at the wavelength of 248nm.