Solid State Seminar schedule, TERM YEAR

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 Date  Speaker  Title  Notes
 Sept 27 Postponed to Oct 11    
 Oct 4 Prof. Alex Yokochi
OSU Chemistry
X-ray scattering as OSU     
 Oct 11 Prof. Janet Tate
OSU Physics
Overview of solid state and materials physics at OSU  
  Oct 17
Tuesday
Gilbert 324
  Prof. John B. Goodenough, University of Texas at Austin  Vibronic Superconductivity in the Copper Oxides  Pauling Lecture
  Oct 18
Wednesday
Gilbert 324
  Prof. John B. Goodenough, University of Texas at Austin  Lithium-Insertion Compounds  Pauling Lecture
Oct 19
Thursday
Gilbert 324
Prof. John B. Goodenough, University of Texas at Austin Oxide-Ion Conductors  Pauling Lecture
Oct 25 Prof David Cohen,
University of Oregon Physics
Towards an Economical Photovoltaic Technology in a Few Years: Prospects, Progress and Problems    
 Nov 1 Prof John L. Freeouf
Oregon Graduate Institute
Vacuum UV ellipsometry on wide band gap materials (abstract)  
 Nov 8 Prof. Henri Jansen
OSU Physics
 Calculation of electronic band stucture     
Nov 15 Prof. William Warren
OSU Physics
Electronic properties of non-crystalline materials  
 Nov 22 No seminar  No seminar  
 Nov 29
Thursday
Gilbert 324
Michael Tassotto
OSU Physics
Time-of-Flight Direct Recoil Spectrometry: Application to Liquid Surfaces and Steps toward Quantification  PhD defense


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Vacuum UV ellipsometry on wide band gap materials

Spectroscopic ellipsometry has become an important tool in characterizing many materials in the past few decades. Aside from the intrinsic utility of providing highly accurate measurements of the bulk dielectric response of new materials, it has proven exceptionally useful in the study of such multi-layered structures as are used for example for the gate dielectrics in CMOS technology or heterojunctions in HBT technology.

Current semiconductor technologies are driving a need for higher energy measurements, however: The scaling often predicted for CMOS technology leads to SiO2 (or ONO or NO or ...) gate thicknesses of under 2 nm, which cannot be accurately measured by conventional ellipsometry but CAN be measured accurately if the photon energy range is extended to include 9 or 10 eV photons. The same extended photon energy range permits us to establish the properties of materials as exemplified by critical points beyond the range of conventional ellipsometry B i. e., at energies above perhaps 6 eV. Such materials include the conventional high band gap semiconductors such as SiC, GaN, and the alloy series AlGaN. It also must include all possible dielectrics (AHigh _ Dielectrics@) proposed to replace SiO2, as these materials must have a sufficient barrier to both valence and conduction bands as to permit MOSFET operation.

This presentation will discuss the difficulties involved in extending the photon energy range of spectroscopic ellipsometry, and show how we overcame those problems. We shall illustrate the improvements expected in measurements of thin dielectric gate stacks. We shall show results obtained for the bulk properties of several proposed new high _ dielectrics. Finally, we shall show results for measurements for several surface treatments of SiC.